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srs PPR Series-Process monitoring systems
主要指标与说明The PPR Process Monitoring System is designed for inline process monitoring and diagnosis. Two paths are provided to the residual gas analyzer (RGA): a high conductivity path for monitoring base vacuum, and a pressure reducing path for monitoring the process at operating pressure.
PPR Vacuum Process Monitoring Systems0.01, 0.1, 1.0 or 10 Torr inlet pressure3 × 10-5 Torr-L/s flow rate2 second response time (0.1 Torr)100, 200 or 300 amu systems6 orders of magnitude dynamic rangeRGA Windows softwarePPR Vacuum Process Monitoring SystemsThe PPR Process Monitoring System is designed for inline process monitoring and diagnosis. Two paths are provided to the residual gas analyzer (RGA): a high conductivity path for monitoring base vacuum, and a pressure reducing path for monitoring the process at operating pressure. The pressure reducing path contains a micro-hole orifice which is designed to operate at one of the following pressures: 0.01, 0.1, 1 or 10 Torr. It reduces the sample pressure to the operating pressure of the RGA (about 10-6 Torr). This pressure drop is maintained by the pumping system which consists of a hybrid turbomolecular pump and a diaphragm pump. Both pumps are oil free and will not contaminate your process.The inlet assembly that attaches to your process chamber can be configured in several ways (see drawings). The system includes an RGA, by-pass valve assembly and Tee, a controller, turbo pump, diaphragm pump, and Windows software program for data acquisition and control.The software is used to operate the instrument in various modes, including analog scan, histogram mode, and pressure vs. time mode. Both Faraday cup and electron multiplier detectors are standard with the PPR system. The electron multiplier provides additional sensitivity and higher scan speeds. The PPR system is shipped compley assembled and calibrated, and is ready to attach to your vacuum process chamber.PPR Vacuum Process Monitoring SystemsPerformanceGas flow 3 × 10-5 mbar-L/s with pressure reduction inlet activeResponse time 2 seconds at 0.1 mbar inlet pressure (scales linearly with pressure)Start-up time 8 minutes nominalConnectionsInlet 2.75" CF flange, rotatable with through holesTurbo pump to controller 6 ft. cable (provided)Turbo to backing pump 6 ft. flexible hose (provided), 1/4" ID × 7/16" ODComputer interface RS-232C (28,800 baud, 9-pin D connector)Software RGA Windows application
PumpsHigh vacuum Hybrid turbomolecular/drag pump, 70 L/s, ultimate pressure 2 × 10-9 mbarBacking Diaphragm pump with ultimate pressure less than 1 mbar. Protection class IP44Cooling Requires forced air coolingGeneralPower requirements 110 VAC @ 60 Hz, 220 VAC @ 50 Hz (not field selectable), 300 WDimensions Vary with configuration (see sample configurations)Weight 16 lbs. (turbo pump, by-pass valve and Tee, RGA)33 lbs. (diaphragm pump and controller)Warranty One year parts and labor on defects in material or workmanship. Pump seals and diaphragm warranted for 90 days.
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光示波器/眼图仪—Agilent 86100A, Agilent 86100B, Agilent 86100C, Agilent 86100D,Agilent 86105A, Agilent 86105B, Agilent 86116C, Agilent 86105D, Agilent 86103A, Agilent 86106B, Agilent 86103B, Agilent 83493A, Agilent 83496A, Agilent 86118A, Agilent 54754A,Tektronix DSA 8300,Tektronix DSA 8200,Tektronix 80C08,Tektronix 80C15,Tektronix 80C07, Tektronix 82A04,Tektronix 80E04,Anritsu MP2100B光谱分析:Agilent 86142B, Agilent 86146B,Agilent 86140B,Anritsu MS9740A,Anritsu MS 9710C,Anritsu MS9710B,Yokogawa 6317B,Yokogawa:6370D波长计:Agilent 86122A,Agilent 86120B,Agilent 86120C,EXFO WA1600,EXFO WA1650,EXFO WA1100光衰减器:Agilent 8156A,Agilent 8157A,Agilent 81570A,Agilent 81571A,Agilent 81576A,Agilent 81577A,Agilent 81567A,JDSU HA-9光万用表:Agilent 8164A,Agilent 8164B,Agilent 8163A,Agilent 8163B,Agilent 8153A,Agilent 8166B,Agilent N7744A,Agilent N7745A,Agilent N7748A,Agilent 81632B,Agilent 81633A,Agilent 81634A,Agilent 81634B,Agilent 81635A,Agilent 81636B,Agilent 86137B,Agilent 81623A,Agilent 81623B,Agilent 81624A,Agilent 81624B,Agilent 81625A,Agilent 81625B,Agilent 81626B,Agilent 81628B,Agilent N7752A误码仪:Agilent N5980A,Agilent N4901A,Agilent N4903A,Agilent N4906A光开关:Agilent 81595B,Agilent 86062C,JDSU SB optical switch可调光源:Agilent 81640A,Agilent 81642A,Agilent 81680A,Agilent 81682A,Agilent 81600B网络分析仪:Agilent E5071C,Agilent 8722ES,Agilent 8720ES,Agilent E5061B,Agilent E5062A,R&S ZNB射频信号源:Agilent E4438C,Agilent 8257D,Agilent N5181A,Agilent N5182A,Aglent N5182B,Agient N5183A,Agilent 8257D,Agilent 8267D频谱分析仪:Agilent E4440A,Agilent N9010A,Agilent N9020A,Agilent N9030AWifi/蓝牙测试仪:Anritsu 8852B,LitePoint IQxel 80,,LitePoint IQXEL 160,,LitePoint 2011,,LitePoint IQ flex,Agilent N4010A
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