srs PPR Series-Process monitoring systems

srs PPR Series-Process monitoring systems

主要指标与说明The PPR Process Monitoring System is designed for inline process monitoring and diagnosis. Two paths are provided to the residual gas analyzer (RGA): a high conductivity path for monitoring base vacuum, and a pressure reducing path for monitoring the process at operating pressure.

PPR Vacuum Process Monitoring Systems0.01, 0.1, 1.0 or 10 Torr inlet pressure3 × 10-5 Torr-L/s flow rate2 second response time (0.1 Torr)100, 200 or 300 amu systems6 orders of magnitude dynamic rangeRGA Windows softwarePPR Vacuum Process Monitoring SystemsThe PPR Process Monitoring System is designed for inline process monitoring and diagnosis. Two paths are provided to the residual gas analyzer (RGA): a high conductivity path for monitoring base vacuum, and a pressure reducing path for monitoring the process at operating pressure. The pressure reducing path contains a micro-hole orifice which is designed to operate at one of the following pressures: 0.01, 0.1, 1 or 10 Torr. It reduces the sample pressure to the operating pressure of the RGA (about 10-6 Torr). This pressure drop is maintained by the pumping system which consists of a hybrid turbomolecular pump and a diaphragm pump. Both pumps are oil free and will not contaminate your process.The inlet assembly that attaches to your process chamber can be configured in several ways (see drawings). The system includes an RGA, by-pass valve assembly and Tee, a controller, turbo pump, diaphragm pump, and Windows software program for data acquisition and control.The software is used to operate the instrument in various modes, including analog scan, histogram mode, and pressure vs. time mode. Both Faraday cup and electron multiplier detectors are standard with the PPR system. The electron multiplier provides additional sensitivity and higher scan speeds. The PPR system is shipped compley assembled and calibrated, and is ready to attach to your vacuum process chamber.PPR Vacuum Process Monitoring SystemsPerformanceGas flow 3 × 10-5 mbar-L/s with pressure reduction inlet activeResponse time 2 seconds at 0.1 mbar inlet pressure (scales linearly with pressure)Start-up time 8 minutes nominalConnectionsInlet 2.75" CF flange, rotatable with through holesTurbo pump to controller 6 ft. cable (provided)Turbo to backing pump 6 ft. flexible hose (provided), 1/4" ID × 7/16" ODComputer interface RS-232C (28,800 baud, 9-pin D connector)Software RGA Windows application

PumpsHigh vacuum Hybrid turbomolecular/drag pump, 70 L/s, ultimate pressure 2 × 10-9 mbarBacking Diaphragm pump with ultimate pressure less than 1 mbar. Protection class IP44Cooling Requires forced air coolingGeneralPower requirements 110 VAC @ 60 Hz, 220 VAC @ 50 Hz (not field selectable), 300 WDimensions Vary with configuration (see sample configurations)Weight 16 lbs. (turbo pump, by-pass valve and Tee, RGA)33 lbs. (diaphragm pump and controller)Warranty One year parts and labor on defects in material or workmanship. Pump seals and diaphragm warranted for 90 days.

Agilent 83497A 光电时钟恢复模块

Agilent 8157A 光衰减仪

Agilent 81637B 快速功率计

Agilent 34570A 数字万用表

Agilent 44476A 微波复用器模块

Agilent 70004A 光谱分析仪

Agilent 81000FI 光纤连接器

Agilent 81002FF 积分球

Agilent 81521B 光功率计探头

Agilent 81524A 光功率探头

Agilent 81525A 大功率光学探头

Agilent 81533A 接口模块

Agilent 81533B 接口模块

Agilent 81536A 光功率计传感插件

Agilent 81560A 可变光衰减器

Agilent 81567A 可变光衰减器模块

Agilent 8156A 光衰减器

Agilent 81578A可变光衰减器模块

Agilent 81610A回损测试模块

Agilent 81619A 光功率模块

Agilent 81624A 光学探头

Agilent 81625A 光功率探头

Agilent 81633A 分布式反馈(DFB)激光器

Agilent 81635A 双光功率传感器

Agilent 8163A光功率计主机

Agilent 8163B 光功率计

Agilent 8164A 光波测量系统主机

Agilent 81650A 单法布里-珀罗激光源

Agilent 81651A 光源模块

Agilent 81654A 法布里-珀罗激光源

Agilent 81662A 分布式反馈(DFB)激光器

Agilent 8168E 可调谐激光源

Agilent 83440D光波转换器

Agilent 83480A 数字通信分析仪

Agilent 83483A 双通道电模块

Agilent 83486A 光电模块

Agilent 83487A 光电模块

Agilent 83492A 多模时钟模块

Agilent 83493A 单模时钟恢复模块

Agilent 83494A 单模时钟恢复模块

Agilent 83495A 时钟恢复模块

Agilent 83496A 光电时钟恢复模块

Agilent 86100A 光示波器

Agilent 86100C 宽带示波器主机

Agilent 86103A 光电模块

Agilent 86103B 光电模块

Agilent 86105A 光电模块

Agilent 86105B 光电模块

Agilent 86106B 光电模块

Agilent 86107A 精密时基参考模块

Agilent 86120B 多波长计

Agilent 86120C 多波长计

Agilent 86142B 高性能光谱分析仪

Agilent 86146b 光谱分析仪

Agilent N7740 多端口光功率计

Ando AQ2140光功率计

Ando AQ2730光功率计模块

Ando AQ2742 光功率传感器

Ando AQ2743 光功率传感器

Ando AQ4211LD组件

Ando AQ4215 光功率计

Andu AQ-4137 光源

Andu AQ-4142 光源

Anritsu 69347B 信号源

Anritsu MN9610B光衰减器

Anritsu ms9710c 光谱分析仪

Anritsu MS9740A 台式光谱分析仪

CVI Melles Griot 05-LHP-211-1 激光器

Ericsson FSU-975 光纤熔接机

Exfo IQS-3150 可变衰减器

EXFO WA-1650 光波长计

HP 8153A 光功率计

HP 8153B 光波万用表

HP 81551MM 点光源模块

HP 83540A 插件信号源

HP 8595E 频谱分析仪

IFR GPS-101定位系统模拟器

Jdsu HA9 光衰减器

JDSU OLP-55 光功率计

Keithley 7001半导体开关系统

Keithley 2001A 数字多用表

Keithley 2400 数字源表

Keithley 2400-C 数字源表

Keithley 2500 数字源表

Keithley 2502 数字源表

KEITHLEY 6221 电流源表

Keysight 11708A 衰减器垫

Keysight 3458A 数字多用表

Keysight 34903A GP开关模块

Keysight 81570A 可变光衰减器模块

Keysight 81618A 接口模块

Keysight 81623B 锗光功率探头

Keysight 81630B 大功率光传感器

Keysight 81634B 低偏振相关光功率传感器

Keysight 81636B 光功率传感器

Keysight 8164B 光波测量系统主机

Keysight 82357B GPIB 卡

Keysight 86100D 宽带宽示波器主机

Keysight 86105C 光电采样模块

Keysight 86105D 光电模块

Keysight E3631A 三路输出电源

Keysight J7231B 抖动通信性能分析仪

Keysight N5181A 射频模拟信号发生器

Keysight N5980A 比特误码率测试仪

Keysight N7744A 多端口光功率计

Keysight N7748A 高性能光功率计

Newport 818-IG高性能光电二极管传感器

Newport 918-IG 高性能光电二极管传感器

Newport 918-ir 高性能光电二极管传感器

NI PCI GPIB小卡

NI PXI-1031 板卡

Photom EP-712 光功率计

Picometrix PT-12B 光电转换芯片

R&S FSP3 频谱分析仪

R&S NRPZ51 射频功率计

R&S NRPZ55 射频功率计

R&S NRP-Z55 射频功率计

Tektronix DPP125B 误码仪

Tektronix 80C02 光采样模块

Tektronix 80E04 双通道时域反射计

Tektronix DSA8200 采样示波器

Tektronix DSA8300 数字采样示波器

USHIO UXM-Q256BY点光源

YOKOGAWA AQ2200-421 单槽型光开关

YOKOGAWA AQ2201 帧控制器主机

 光示波器/眼图仪—Agilent 86100A, Agilent 86100B, Agilent 86100C, Agilent 86100D,Agilent 86105A, Agilent 86105B, Agilent 86116C, Agilent 86105D, Agilent 86103A, Agilent 86106B, Agilent 86103B, Agilent 83493A, Agilent 83496A, Agilent 86118A, Agilent 54754A，Tektronix DSA 8300，Tektronix DSA 8200，Tektronix 80C08，Tektronix 80C15，Tektronix 80C07, Tektronix 82A04，Tektronix 80E04,Anritsu MP2100B光谱分析：Agilent 86142B, Agilent 86146B,Agilent 86140B,Anritsu MS9740A,Anritsu MS 9710C,Anritsu MS9710B,Yokogawa 6317B,Yokogawa:6370D波长计：Agilent 86122A,Agilent 86120B,Agilent 86120C,EXFO WA1600,EXFO WA1650,EXFO WA1100光衰减器：Agilent 8156A,Agilent 8157A，Agilent 81570A,Agilent 81571A,Agilent 81576A,Agilent 81577A，Agilent 81567A,JDSU HA-9光万用表:Agilent 8164A,Agilent 8164B,Agilent 8163A,Agilent 8163B,Agilent 8153A,Agilent 8166B,Agilent N7744A,Agilent N7745A,Agilent N7748A,Agilent 81632B,Agilent 81633A,Agilent 81634A,Agilent 81634B,Agilent 81635A,Agilent 81636B,Agilent 86137B,Agilent 81623A,Agilent 81623B,Agilent 81624A,Agilent 81624B,Agilent 81625A,Agilent 81625B,Agilent 81626B,Agilent 81628B,Agilent N7752A误码仪：Agilent N5980A,Agilent N4901A,Agilent N4903A,Agilent N4906A光开关：Agilent 81595B,Agilent 86062C,JDSU SB optical switch可调光源：Agilent 81640A,Agilent 81642A,Agilent 81680A，Agilent 81682A，Agilent 81600B网络分析仪：Agilent E5071C，Agilent 8722ES,Agilent 8720ES,Agilent E5061B,Agilent E5062A，R&S ZNB射频信号源：Agilent E4438C,Agilent 8257D，Agilent N5181A,Agilent N5182A,Aglent N5182B,Agient N5183A,Agilent 8257D，Agilent 8267D频谱分析仪：Agilent E4440A,Agilent N9010A，Agilent N9020A，Agilent N9030AWifi/蓝牙测试仪：Anritsu 8852B,LitePoint IQxel 80，,LitePoint IQXEL 160，,LitePoint 2011，,LitePoint IQ flex，Agilent N4010A